Univ.-Prof. Dr. Gerd Schönhense - Publikationen

Lin, JQ; Maul, J; Weber, N et al.
Inspection of EUVL mask blank defects and patterned masks using EUV photoemission electron microscopy
MICROELECTRONIC ENGINEERING. Bd. 85. H. 5-6. AMSTERDAM: ELSEVIER SCIENCE BV 2008 S. 922 - 924

Martyanov, ON; Yudanov, VF; Lee, RN et al.
Ferromagnetic resonance study of thin film antidot arrays: Experiment and micromagnetic simulations
PHYSICAL REVIEW B. Bd. 75. H. 17. COLLEGE PK: AMERICAN PHYSICAL SOC 2007

Lin, JQ; Neuhaeusler, U; Slieh, J et al.
Actinic extreme ultraviolet lithography mask blank defect inspection by photoemission electron microscopy
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. Bd. 24. H. 6. MELVILLE: A V S AMER INST PHYSICS 2006 S. 2631 - 2635