Prof. Dr.-Ing. Dara Feili - Publikationen

Saremi, S; Feili, Dara; Alyari, Alborz et al.
MEMS-basierter thermischer Durchflusssensor für eine Flussmessung mit hoher Dynamik
MikroSystemTechnik 2015. Bd. MikroSystemTechnik Kongress 2015. 2025

Afshar, Maziar; Leber, M; Poppendieck, W et al.
On-Chip Impedanz Trimming von transparenten und flexiblen ITO-Elektroden durch Laser Induzierte Nanocuts
MikroSystemTechnik 2015. Bd. MikroSystemTechnik Kongress 2015. 2025

Kiefer, Christian; Feili, Dara; Bauer, Karin et al.
Flow Manipulation by Standing Acoustic Waves and Visualization with Background Oriented Schlieren (BOS)
Notes on Numerical Fluid Mechanics and Multidisciplinary Design. Springer International Publishing 2017 S. 229 - 237

Qiu, Huacheng; Xiao, Dingbang; Feili, Dara et al.
Hydrodynamic analysis of piezoelectric microcantilevers vibrating in viscous compressible gases
Sensors and Actuators A: Physical. Bd. 238. Elsevier BV 2016 S. 299 - 306

Afshar, Maziar; Leber, Moritz; Poppendieck, Wigand et al.
On-chip nanostructuring and impedance trimming of transparent and flexible ITO electrodes by laser induced coherent sub-20 nm cuts
Applied Surface Science. Bd. 360. Elsevier BV 2016 S. 494 - 501

Feili, Dara
1. Nanoprocessing using near-infrared sub-15 femtosecond laser microscopes
Optically Induced Nanostructures. De Gruyter 2015 S. 3 - 24

Kreher, H.; Dahmke, I. N.; Seidel, H. et al.
A continuous flow microfluidic chip with integrated concentration gradient generator for cell culturing
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). IEEE 2015 S. 1810 - 1813

Qiu, Huacheng; Schwarz, Patrick; Feili, Dara et al.
Air damping of micro bridge resonator vibrating close to a surface with a moderate distance
Journal of Micromechanics and Microengineering. Bd. 25. H. 5. IOP Publishing 2015 S. 055016

Qiu, Huacheng; Ababneh, Abdallah; Feili, Dara et al.
Analysis of intrinsic damping in vibrating piezoelectric microcantilevers
Microsystem Technologies. Bd. 22. H. 8. Springer Science and Business Media LLC 2015 S. 2017 - 2025

Ababneh, A.; Al-Omari, A. N.; Dagamseh, A. M. K. et al.
Electrical and morphological characterization of platinum thin-films with various adhesion layers for high temperature applications
Microsystem Technologies. Bd. 23. H. 3. Springer Science and Business Media LLC 2015 S. 703 - 709

Klötzer, Madlen; Afshar, Maziar; Feili, Dara et al.
Generation of laser-induced periodic surface structures in indium-tin-oxide thin films and two-photon lithography of ma-N photoresist by sub-15 femtosecond laser microscopy for liquid crystal cell application
SPIE Proceedings. Bd. 9351. SPIE 2015 S. 93511O

Feili, Dara; Penth, Michael; Kiefer, Christian et al.
Gesputterte Germanium-Dünnfilme auf flexiblen transparenten Substraten für elektro-optische Applikationen
h MikroSystemTechnik 2015 -. Bd. MikroSystemTechnik Kongress 2015. 2015

Afshar, Maziar; Preiß, Elisabeth M.; Sauerwald, Tilman et al.
Indium-tin-oxide single-nanowire gas sensor fabricated via laser writing and subsequent etching
Sensors and Actuators B: Chemical. Bd. 215. Elsevier BV 2015 S. 525 - 535

König, Karsten; Ostendorf, Andreas; Feili, Dara
Optically induced nanostructures : biomedical and technical applications
BerlinBoston, Mass.: ˜Deœ Gruyter 2015 329 S.

Qiu, Huacheng; Feili, Dara; Wu, Xuezhong et al.
Resonant-mode effect on fluidic damping of piezoelectric microcantilevers vibrating in an infinite viscous gaseous environment
Sensors and Actuators A: Physical. Bd. 232. Elsevier BV 2015 S. 1 - 7

Pagel, Natalie; Mettel, Cecil; Feili, Dara et al.
Simulation und Messungen zum Mikroelektrospray-Verfahren
MikroSystemTechnik 2015. Bd. MikroSystemTechnik Kongress 2015. 2015

Saremi, S.; Alyari, A.; Feili, D. et al.
A MEMS-based hot-film thermal anemometer with wide dynamic measurement range
IEEE SENSORS 2014 Proceedings. IEEE 2014 S. 420 - 423

Schüle, M.; Afshar, M.; Feili, D. et al.
Incubation and nanostructure formation on n- and p-type Si(1 0 0) and Si(1 1 1) at various doping levels induced by sub-nanojoule femto- and picosecond near-infrared laser pulses
Applied Surface Science. Bd. 314. Elsevier BV 2014 S. 21 - 29

Qiu, Hua-Cheng; Feili, Dara; Wu, Xue-Zhong et al.
Resonance-mode effect on piezoelectric microcantilever performance in air, with a focus on the torsional modes
Chinese Physics B. Bd. 23. H. 2. IOP Publishing 2014 S. 027701

Sauerwald, T.; Afshar, M.; Rodner, M. et al.
1.3 - Stickoxidsensor aus einem einzelnen Indium-Zinnoxid (ITO) Nanodraht
Tagungsband. Dresden: AMA Service GmbH, Von-Münchhausen-Str. 49, 31515 Wunstorf, Germany 2013 S. 18 - 21

Hau, Steffen; Marschibois, M; Seidel, Helmut et al.
AlN auf flexiblem Substrat für langzeitstabile, energieautonome Sensorsysteme
Mikrosystemtechnik 2013. Aachen: VDE 2013

Wang, Gang; Xu, Li-Xin; Ababneh, Abdallah et al.
AlN micromechanical radial-contour disc resonator
Journal of Micromechanics and Microengineering. Bd. 23. H. 9. IOP Publishing 2013 S. 095002

Qiu, Huacheng; Feili, Dara; Wu, W Z et al.
Dynamic analysis of the torsional resonant mode of piezoelectric microcantilevers
Mikrosystemtechnik 2013. Aachen: VDE 2013

Qiu, Huacheng; Feili, Dara; Wu, X Z et al.
Dynamic analysis of the torsional resonant mode of piezoelectric microcantilevers
Mikrosystemtechnik 2013. Aachen: VDE 2013

Ababneh, Abdallah; Al-Omari, A. N.; Dagamseh, A. M. K. et al.
Electrical characterization of micromachined AlN resonators at various back pressures
Microsystem Technologies. Bd. 20. H. 4-5. Springer Science and Business Media LLC 2013 S. 663 - 670

Qiu, H C; Schwarz, P; Völlm, H et al.
Electrical crosstalk in two-port piezoelectric resonators and compensation solutions
Journal of Micromechanics and Microengineering. Bd. 23. H. 4. IOP Publishing 2013 S. 045007

Ababneh, A.; Al-Omari, A. N.; Marschibois, M. et al.
Investigations on the high temperature compatibility of various adhesion layers for platinum
SPIE Proceedings. Bd. 8763. Grenoble, France: SPIE 2013 S. 87631

Afshar, M.; Preiss, E.; Sauerwald, T. et al.
ITO nanowires for gas-sensor applications
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Suzhou, China: IEEE 2013 S. 1123 - 1126

Afshar, Maziar; Preiß, Elisabeth; Sauerwald, Tilman et al.
Neuartige laserinduzierte ITO Nanodrähte für Gassensorik-Anwendungen
Mikrosystemtechnik 2013. Aachen: VDE 2013

Straub, Martin; Weigand, Benjamin; Afshar, Maziar et al.
Periodic subwavelength ripples on lithium niobate surfaces generated by tightly focused sub-15 femtosecond sub-nanojoule pulsed near-infrared laser light
Journal of Optics. Bd. 15. H. 5. IOP Publishing 2013 S. 055601

Völlm, Henning; Herrmann, Jonathan; Maier, Reinhard et al.
Simulation and design optimization of transparent heaters for spectroscopic micro cells
SPIE Proceedings. Bd. 8763. Grenoble, France: SPIE 2013 S. 87632

Straub, M.; Schüle, M.; Afshar, M. et al.
Sub-15 femtosecond laser-induced nanostructures emerging on Si(100) surfaces immersed in water: analysis of structural phases
Applied Physics A. Bd. 115. H. 1. Springer Science and Business Media LLC 2013 S. 221 - 228

Kirsch, Christian; Feili, Dara; Schmid, Ulrich et al.
Untersuchung des Bucklingeffektes an mittels gesputtertem Wolfram vorgespannten Siliziummembranen für Mikroaktorikanwendungen
MikroSystemTechnik Kongress 2013. Aachen: VDE 2013

Qiu, H. C.; Schwarz, P.; Feili, D. et al.
Viscothermal acoustic waves in micro scale resonators
2013 Transducers &amp; Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS &amp; EUROSENSORS XXVII). IEEE 2013 S. 1719 - 1722

Zhao, Jianguo.; Feili, D.; Vollm, H. et al.
A low cost miniature vortex sensor for turbulence measurement
2012 IEEE Sensors. Taipei, Taiwan: IEEE 2012 S. 1 - 4

Qiu, H. C.; Schwarz, P.; Feili, D. et al.
Electrical performance analysis and characterization of two port piezoelectric resonators
Microsystem Technologies. Bd. 19. H. 8. Springer Science and Business Media LLC 2012 S. 1131 - 1136

Feili, D.; Marschibois, M.; Saremi, S. et al.
Flexible Strain Gauge Sensors with Long-term Stability and Low Power Consumption for Self-sufficient Sensor Systems
Procedia Engineering. Bd. 47. Elsevier BV 2012 S. 782 - 785

Zhao, Jianguo; Völlm, Henning; Feili, Dara et al.
Nano-scale Hot Wire Sensors for Turbulence Measurement Applications
Procedia Engineering. Bd. 47. Elsevier BV 2012 S. 845 - 848

Afshar, M.; Feili, D.; Voellm, H. et al.
Nanoscale laser writing of Indium-Tin-Oxide nanowires
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). Kyoto, Japan: IEEE 2012 S. 441 - 444

Straub, Martin; Afshar, Maziar; Feili, Dara et al.
Periodic nanostructures on Si(100) surfaces generated by high-repetition rate sub-15 fs pulsed near-infrared laser light
Optics Letters. Bd. 37. H. 2. Optica Publishing Group 2012 S. 190

Maier, R.; Häublein, V.; Ryssel, H. et al.
Solid-phase epitaxy of silicon amorphized by implantation of the alkali elements rubidium and cesium
AIP Conference Proceedings. Valladolid, Spain: AIP 2012 S. 276 - 279

König, Karsten; Uchugonova, Aisada; Straub, Martin et al.
Sub-100 nm material processing and imaging with a sub-15 femtosecond laser scanning microscope
Journal of Laser Applications. Bd. 24. H. 4. Laser Institute of America 2012

Afshar, Maziar; Straub, Martin; Voellm, Henning et al.
Sub-100 nm structuring of indium-tin-oxide thin films by sub-15 femtosecond pulsed near-infrared laser light
Optics Letters. Bd. 37. H. 4. Optica Publishing Group 2012 S. 563

Zhang, Huijing; Afshar, Maziar; Feili, Dara et al.
Submicron-dot chains at and beneath surfaces of glasses written by a picojoule 12-fs laser scanning microscope
Applied Physics A. Bd. 107. H. 2. Springer Science and Business Media LLC 2012 S. 339 - 343

Straub, M.; Afshar, M.; Feili, D. et al.
Surface plasmon polariton model of high-spatial frequency laser-induced periodic surface structure generation in silicon
Journal of Applied Physics. Bd. 111. H. 12. AIP Publishing 2012

Feili, D.; Barra, M.; Ziegler, M. et al.
AlN based piezoelectric force sensor for energy autonomous sensor systems
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference. Beijing, China: IEEE 2011 S. 1072 - 1075

Straub, Martin; Afshar, Maziar; Feili, Dara et al.
Efficient Nanostructure Formation on Silicon Surfaces and in Indium Tin Oxide thin Films by sub-15 fs pulsed near-infrared Laser Light
Physics Procedia. Bd. 12. Elsevier BV 2011 S. 16 - 23

Afshar, Maziar; Saremi, Somaie; Völlm, Henning et al.
Multiphoton lithography and ITO structuring by high repetition-rate sub-15 femtosecond laser pulses
SPIE Proceedings. Bd. 7920. San Francisco, California, United States: SPIE 2011 S. 792015

Zhang, Huijing; Straub, Martin; König, Karsten et al.
Nanoprocessing of glass and PMMA by means of near-infrared sub-15 femtosecond laser pulses
SPIE Proceedings. Bd. 7921. San Francisco, California, United States: SPIE 2011 S. 79210

Qiu, Huacheng; Schwarz, Patrick; Feili, Dara et al.
Performance Modeling and Characterization of AlN Resonator
MikroSystemTechnik Kongress 2011 (Hrsg). MikroSystemTechnik Kongress 2011. Darmstadt: VDE 2011 S. 833 - 836

König, Karsten; Uchugonova, Aisada; Straub, Martin et al.
Sub-100nm material processing with sub-15 femtosecond picojoule near infrared laser pulses
SPIE Proceedings. Bd. 7903. San Francisco, California, United States: SPIE 2011 S. 79031

Licht, Martin; Straub, Martin; König, Karsten et al.
Three-dimensional polymer nanostructures for applications in cell biology generated by high-repetition rate sub-15 fs near-infrared laser pulses
SPIE Proceedings. Bd. 7908. San Francisco, California, United States: SPIE 2011 S. 79080

Feili, D.; Pagel, N.; Schwarz, P. et al.
Ultrathin Glass as Flexible Substrate in Wireless Sensor Applications
Procedia Engineering. Bd. 25. Elsevier BV 2011 S. 511 - 514

Feili, D.; Pagel, N.; Ngo, V.L. et al.
Cu based patch antenna on polymer substrate for flexible wireless sensor systems applications
Procedia Engineering. Bd. 5. Elsevier BV 2010 S. 890 - 893

Feili, D; Pagel, N; Ngo, V L et al.
Effect of substrate on reliability and antenna indicator parameters of Cu based patch antenna
2010 IEEE Sensors. Waikoloa, HI, USA: IEEE 2010 S. 1342 - 1345

Feili, Dara; Kirsch, Christian; Kreher, Heike et al.
ilicon based CMOS compatible lab on chip system cytotoxicity and design considerations
Biomedizinische Technik, Biomedical Engineering BMT 2010 (Hrsg). Proceedings / Biomedizinische Technik, Biomedical Engineering BMT 2010 ; 44. Jahrestagung der DGMBT Jahrestagung, Rostock-Warnemünde, p. 128-130. Bd. 44. Jahrestagung der DGMBT Jahrestagung,. Rostock-Warnemünde. 2010

König, Karsten; Uchugonova, Aisada; Schug, Michael et al.
Two-photon lithography and nanoprocessing with picojoule extreme ultrashort 12 femtosecond laser pulses
SPIE Proceedings. Bd. 7584. San Francisco, California, United States: SPIE 2010 S. 75840

Schwarz, P.; Feili, D.; Engel, R. et al.
Vacuum pressure and gas detection with a silicon based micromechanical squeeze film sensor
Procedia Engineering. Bd. 5. Elsevier BV 2010 S. 750 - 753

Feili, Dara; Seidel, Helmut; Schuettler, Martin et al.
Parylen C basierte organische Schaltungen für Applikationen in Implantaten
Proceedings: MikroSystemTechnik 2009. Berlin: VDE 2009

Feili, Dara; Schuettler, Martin; Stieglitz, Thomas
Matrix-addressable, active electrode arrays for neural stimulation using organic semiconductors—cytotoxicity and pilot experimentsin vivo
Journal of Neural Engineering. Bd. 5. H. 1. IOP Publishing 2007 S. 68 - 74

Feili, Dara; Schuettler, Martin; Doerge, Thomas et al.
Flexible organic field effect transistors for biomedical microimplants using polyimide and parylene C as substrate and insulator layers
Journal of Micromechanics and Microengineering. Bd. 16. H. 8. IOP Publishing 2006 S. 1555 - 1561

Koch, Klaus Peter; Ramachandran, Anup; Poppendieck, Wigand et al.
Polymer-Based Implantable Electrodes: State of the Art and Future Prospects
MRS Proceedings. Bd. 926. Springer Science and Business Media LLC 2006

Hoffmann, K. -P.; Feili, D.; Ramachandran, A. et al.
Development of implantable microelectrodes using converging technologies
Medical Physics. Vol. 2. Berlin: Schiele & Schön 2005

Feili, Dara; Schuettler, Martin; Doerge, Thomas et al.
Encapsulation of organic field effect transistors for flexible biomedical microimplants
Sensors and Actuators A: Physical. Bd. 120. H. 1. Elsevier BV 2005 S. 101 - 109

Feili, Dara; Schuettler, Martin; Stieglitz, Thomas
Flexible microelectrode arrays with integrated organic semiconductors
Bournemouth, UK. 2004 3 S.